Book: Handbook Of Sputter Deposition Technology: Principles, Technology And Applications A concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production, and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Details of Book: Handbook Of Sputter Deposition Technology: Principles, Technology And Applications Book: Handbook Of Sputter Deposition Technology: Principles, Technology And Applications
Author: Kiyotaka Wasa, Shigeru Hayakawa, Shigeru Haber
ISBN: 0815512805
ISBN-13: 9780815512806
, 978-0815512806
Binding: Hardcover
Publishing Date: 31121992
Publisher: William Andrew Publishing
Number of Pages: 316
Language: English