Book: Ultra-clean Technology Handbook: Volume 1: Ultra-pure Water Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
Details of Book: Ultra-clean Technology Handbook: Volume 1: Ultra-pure Water Book: Ultra-clean Technology Handbook: Volume 1: Ultra-pure Water
Author: Ohmi, T. Ohmi, Tadahiro Ohmi
ISBN: 0824787536
ISBN-13: 9780824787530
, 978-0824787530
Binding: Hardcover
Publishing Date: 1993-06-29
Publisher: Crc Press
Number of Pages: 944
Language: English