Vlsi Technology

The second edition of Sze: VLSI Technology describes the theoretical and practical aspects of the most advanced state of electronics technology-very large scale integration (VLSI). From crystal growth to reliability testing, the reader is presented with all the major steps in the fabrication of VLSI circuits. In addition many broader topics such as process simulation and analytical techniques are considered in detail. Each chapter describes one aspect of VLSI processing. The problem at the end of each chapter form an integral part of the development of the topic. The book is intended as a textbook for senior undergraduate or first-year graduate students in applied physics, electrical engineering and material science; it assumes that the reader has already acquired an introductory understanding of the physics and technology of semiconductor devices. Because it elaborates on integrated circuit(IC) processing technology in a detailed and comprehensive manner, it can also serve as a reference for those actively involved in integrated circuit fabrication and process development.