MEMS Mechanical Sensors (English, Hardcover, Beeby Steve P.)

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Author

Beeby Steve P.

Highlights

Language: English
Binding: Hardcover
Publisher: Artech House Publishers
Genre: Technology & Engineering
ISBN: 9781580535366, 9781580535366
Pages: 284

Description

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

Specifications

Book Details

Imprint

Artech House Publishers

Dimensions

Width	17 mm
Height	254 mm
Length	178 mm
Weight	711 gr

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