RF MEMS Switches: Design, Simulation, Fabrication and Characterization  (English, Paperback, Lakshmi Narayana Thalluri, S R Sastry Kalavakolanu)

Written for practitioners, researchers, and students and relevant to radio frequency applications, MEMS devices fabrication and character-ization, reconfigurable antennas. Skillfully integrates the many disciplines at work in MEMS, antennas, surface micromachining, material analysis, structural analysis and MEMS characterization. Overall the design, simulations, fabrications and characterization of EF MEMS switches is covered.