Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications  (English, Paperback, unknown)

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    Highlights
    • Language: English
    • Binding: Paperback
    • Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
    • Genre: Technology & Engineering
    • ISBN: 9783642632211, 9783642632211
    • Pages: 310
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  • Description
    Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for < 0.18 um process technology. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability. This volume will be an invaluable resource for professionals, scientists, researchers and graduate students involved in dielectric technology development, materials science, polymer science, and semiconductor devices and processing.
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    Specifications
    Book Details
    Imprint
    • Springer-Verlag Berlin and Heidelberg GmbH & Co. K
    Series & Set Details
    Series Name
    • Springer Series in Advanced Microelectronics
    Dimensions
    Height
    • 235 mm
    Length
    • 155 mm
    Weight
    • 510 gr
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