Lecture Notes on Principles of Plasma Processing
Share

Lecture Notes on Principles of Plasma Processing  (English, Paperback, Chen Francis F.)

Be the first to Review this product
₹6,620
11,852
44% off
i
Available offers
  • Bank Offer5% cashback on Flipkart Axis Bank Credit Card upto ₹4,000 per statement quarter
    T&C
  • Bank Offer5% cashback on Axis Bank Flipkart Debit Card up to ₹750
    T&C
  • Bank OfferFlat ₹10 Instant Cashback on Paytm UPI Trxns. Min Order Value ₹500. Valid once per Paytm account
    T&C
  • Delivery
    Check
    Enter pincode
      Delivery by28 Jul, Monday
      ?
    View Details
    Author
    Read More
    Highlights
    • Language: English
    • Binding: Paperback
    • Publisher: Springer Science+Business Media
    • Genre: Science
    • ISBN: 9780306474972, 9780306474972
    • Pages: 208
    Services
    • Cash on Delivery available
      ?
    Seller
    abbistraders
    (Not Enough Ratings)
    • 7 Days Replacement Policy
      ?
  • See other sellers
  • Description
    Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
    Read More
    Specifications
    Book Details
    Imprint
    • Kluwer Academic/Plenum Publishers
    Dimensions
    Height
    • 279 mm
    Length
    • 210 mm
    Weight
    • 1140 gr
    Frequently Bought Together
    Be the first to ask about this product
    Safe and Secure Payments.Easy returns.100% Authentic products.
    You might be interested in
    Medical And Nursing Books
    Min. 50% Off
    Shop Now
    Language And Linguistic Books
    Min. 50% Off
    Shop Now
    Society And Culture Books
    Min. 50% Off
    Shop Now
    School Textbooks
    Don't Miss
    Shop Now
    Back to top